42449.1 IP-ENG

Résumé

ThreeFree

Textes supplémentaires

Abstract

The goal is to develop drift free and stress free ceramic capacitance diaphragm gauges with lead free glass sealing and even better performance than today's state of the art for their core business customers in the semiconductor processing industries, in particular for dry etching processes.

Participants

Gurdial Blugan

Kontaktperson

gurdial.blugan@empa.ch

EMPA Material Science and Technology Gurdial Blugan Überlandstrasse 129 8600 Dübendorf ZH CH

Urs Waelchli

Wirtschaftspartner

urs.waelchli@inficon.com

INFICON HOLDING AG Urs Waelchli Hintergasse 15B 7310 Bad Ragaz SG CH

Détails du projet

Office de recherche: INNOSUISSE
Statut du projet: Abgeschlossen
Type de projet: Forschungsprojekt
Date de début: 2020-12-31
Date de fin: 2023-03-31
Coûts totaux approuvés: CHF 768879.97
Section: 70 Engineering
Domaine politique NABS: Industrielle Produktivität und Technologie

Disciplines de recherche

T120 Systems engineering, computer technology 100.0%